Kushandiswa kwehafnium tetrachloride(HfCl₄) mukugadzira semiconductor inonyanya kutariswa mukugadzirira kwepamusoro dielectric kugara (yakakwirira-k) zvinhu uye kemikari vapor deposition (CVD) maitiro. Izvi zvinotevera maitiro ayo chaiwo:
Kugadzirira kwepamusoro dielectric zvinogara zvinhu
Mhemberero: Nekuvandudzwa kwe tekinoroji yesemiconductor, saizi yematransistors inoramba ichiderera, uye yechinyakare silicon dioxide (SiO₂) gedhi rekuvhara gidhi zvishoma nezvishoma haikwanise kuzadzisa zvinodiwa zvepamusoro-kuita semiconductor zvishandiso nekuda kwedambudziko rekudonha. Yakakwira dielectric inogara zvinhu inogona kuwedzera zvakanyanya capacitance density ye transistors, nekudaro ichivandudza mashandiro emidziyo.
Kushandisa: Hafnium tetrachloride ndiyo yakakosha nhanho yekugadzirira kwepamusoro-k zvinhu (zvakadai sehafnium dioxide, HfO₂). Munguva yekugadzirira, hafnium tetrachloride inoshandurwa kuita hafnium dioxide mafirimu kuburikidza nemakemikari anoita. Aya mafirimu ane akanakisa dielectric zvivakwa uye anogona kushandiswa segedhi rekudzivirira zvidimbu zve transistors. Semuenzaniso, mukuiswa kwepamusoro-k gedhi dielectric HfO₂ yeMOSFET (metal-oxide-semiconductor field-effect transistor), hafnium tetrachloride inogona kushandiswa seyakaiswa gasi rehafnium.
Chemical Vapor Deposition (CVD) Maitiro
Mhedziso: Chemical vapor deposition tekinoroji yakatetepa yekuisa tekinoroji inoshandiswa zvakanyanya mukugadzira semiconductor, iyo inoumba yunifomu yakatetepa firimu pamusoro peiyo substrate kuburikidza nemakemikari maitiro.
Chishandiso: Hafnium tetrachloride inoshandiswa seyakatangira muCVD process yekuisa metallic hafnium kana hafnium compound mafirimu. Aya mafirimu ane kushandiswa kwakasiyana-siyana muzvigadzirwa zve semiconductor, zvakadai sekugadzira high-performance transistors, chiyeuchidzo, etc. Semuenzaniso, mune mamwe maitiro ekugadzira semiconductor yepamusoro, hafnium tetrachloride inoiswa pamusoro pemafuti e-silicon kuburikidza neCVD process kuti iite mafirimu emhando yepamusoro hafnium-based, ayo anoshandiswa kuvandudza kushanda kwemagetsi kwechigadzirwa.
Kukosha Kwekuchenesa Tekinoroji
Mhedzisiro: Mukugadzira semiconductor, kuchena kwechinyorwa kune zvakakosha pakuita kwechishandiso. Yakakwirira-kuchena hafnium tetrachloride inogona kuve nechokwadi chemhando uye kushanda kwefirimu rakaiswa.
Chikumbiro: Kuti uwane zvinodiwa zvekugadzirwa kwepamusoro-soro, kuchena kwehafnium tetrachloride kunowanzoda kusvika kupfuura 99.999%. Semuyenzaniso, Jiangsu Nanda Optoelectronic Materials Co., Ltd. yakawana patent yekugadzirira semiconductor-grade hafnium tetrachloride, iyo inoshandisa high-vacuum decompression sublimation process kuchenesa yakasimba hafnium tetrachloride kuona kuti kuchena kweiyo yakaunganidzwa hafnium tetrachloride inosvika kupfuura 99%. Iyi yakakwirira-kuchena hafnium tetrachloride inogona kunyatsozadzisa zvinodiwa zve14nm process tekinoroji.
Kushandiswa kwehafnium tetrachloride mukugadzira semiconductor hakungosimudziri kuvandudzwa kwekuita semiconductor mudziyo, asi kunopawo hwaro hwezvinhu hwakakosha hwekuvandudza tekinoroji yepamusoro semiconductor mune ramangwana. Nekuenderera mberi kwekufambira mberi kwehunyanzvi hwekugadzira semiconductor, izvo zvinodikanwa zvekuchena uye kunaka kwehafnium tetrachloride zvichakwira nepamusoro, izvo zvinozosimudzira kuvandudzwa kwehunyanzvi hwekuchenesa tekinoroji.
| Product Name | Hafnium tetrachloride |
| CAS | 13499-05-3 |
| Compound Formula | HfCl4 |
| Molecular Weight | 320.3 |
| Chitarisiko | Upfu chena |
Ko kuchena kwehafnium tetrachloride kunokanganisa sei semiconductor zvishandiso?
Kuchena kwehafnium tetrachloride (HfCl₄) ine zvakakosha zvakanyanya pakuita uye kuvimbika kwemidziyo yesemiconductor. Mukugadzira semiconductor, yakakwirira-kuchena hafnium tetrachloride chimwe chezvinhu zvakakosha kuti ive nechokwadi chekushanda kwechigadzirwa uye mhando. Izvi zvinotevera zvinokonzeresa hafnium tetrachloride kuchena pane semiconductor zvishandiso:
1. Mhedzisiro pamhando uye kuita kwemafirimu matete
Kufanana uye kuwanda kwemafirimu matete: Yakakwirira-kuchena hafnium tetrachloride inogona kuumba yunifomu uye dense mafirimu panguva yemakemikari vapor deposition (CVD). Kana hafnium tetrachloride iine tsvina, tsvina iyi inogona kuumba zvikanganiso kana maburi panguva yekuisa, zvichikonzera kuderera kwekufanana uye kuwanda kwefirimu. Semuenzaniso, kusvibiswa kunogona kukonzera kusaenzana kwemufirimu, kukanganisa kushanda kwemagetsi kwechigadzirwa.
Dielectric zvimiro zvemafirimu matete: Paunenge uchigadzira yakakwira dielectric inogara zvinhu (senge hafnium dioxide, HfO₂), kuchena kwehafnium tetrachloride kunokanganisa zvakananga dielectric zvimiro zvemufirimu. Yakakwira-kuchena hafnium tetrachloride inogona kuve nechokwadi chekuti yakaiswa hafnium dioxide firimu ine yakakwira dielectric inogara, yakaderera yekudonha ikozvino uye yakanaka yekuvharisa zvivakwa. Kana hafnium tetrachloride iine tsvina yesimbi kana kumwe kusvibiswa, inogona kuunza mamwe marapirwo ekuchajisa, kuwedzera kudonha kwazvino, uye kuderedza dielectric maitiro emufirimu.
2. Kukanganisa maitiro emagetsi echigadzirwa
Leakage current: Iyo yakakwira kuchena kwehafnium tetrachloride, iyo yakachena iyo firimu yakaiswa, uye idiki iyo inodonha ikozvino. Hukuru hweiyo leakage ikozvino inokanganisa mashandisiro emagetsi uye kuita kwesemiconductor zvishandiso. Yakakwirira-kuchena hafnium tetrachloride inogona kuderedza zvakanyanya kudonha kwezvino, nekudaro ichivandudza kugona kwesimba uye kuita kwechishandiso.
Breakdown voltage: Kuvapo kwetsvina kunogona kuderedza kuparara kwemagetsi emufirimu, zvichiita kuti mudziyo ukuvare zviri nyore pasi pemhepo yakakwira. High-purity hafnium tetrachloride inogona kuwedzera kuparara kwemhepo yefirimu uye kuwedzera kuvimbika kwechigadzirwa.
3. Kukanganisa kuvimbika uye hupenyu hwechigadzirwa
Thermal stability: High-purity hafnium tetrachloride inogona kuchengetedza kugadzikana kwakanaka kwekushisa munzvimbo yakakwirira yekushisa, kudzivisa kuparara kwemafuta kana kuchinja kwechikamu kunokonzerwa nekusvibiswa. Izvi zvinobatsira kuvandudza kugadzikana uye hupenyu hwechigadzirwa pasi pemamiriro ekushanda kwekushisa kwepamusoro.
Kugadzikana kwekemikari: Kusachena kunogona kuita makemikari nezvinhu zvakatenderedza, zvichikonzera kudzikira kwekugadzikana kwemakemikari emudziyo. High-purity hafnium tetrachloride inogona kuderedza kuitika kweiyi kemikari reaction, nekudaro inovandudza kuvimbika uye hupenyu hwechigadzirwa.
4. Kukanganisa pakugadzirwa kwechigadzirwa
Deredza kukanganisa: High-purity hafnium tetrachloride inogona kuderedza kukanganisa mukugadzirisa maitiro uye kugadzirisa kunaka kwefirimu. Izvi zvinobatsira kuvandudza goho rekugadzira remichina semiconductor uye kuderedza mutengo wekugadzira.
Kuvandudza kuenderana: Yakakwirira-kuchena hafnium tetrachloride inogona kuve nechokwadi chekuti mabheti akasiyana emafirimu ane kuita kwakafanana, izvo zvakakosha pakugadzirwa kwakakura kwemidziyo yesemiconductor.
5. Mhedzisiro pamaitiro epamberi
Sangana nezvinodiwa zvemafambisirwo epamberi: Sezvo semiconductor yekugadzira maitiro ari kuramba achikura akananga kune madiki maitirwo, izvo zvinodiwa zvekuchena zvezvinhu zviri kuwedzera nekukwira. Semuenzaniso, semiconductor zvishandiso zvine maitiro e14nm uye pazasi zvinowanzoda kuchena kwehafnium tetrachloride inopfuura 99.999%. Yakakwirira-kuchena hafnium tetrachloride inogona kusangana neyakaomesesa zvinhu zvinodiwa zveaya epamberi maitiro uye ive nechokwadi chekuita kwemidziyo maererano nekuita kwepamusoro, kushandiswa kwesimba shoma uye kuvimbika kwakanyanya.
Kurudzira kufambira mberi kwetekinoroji: Yakakwirira-kuchena hafnium tetrachloride haingogone chete kuzadzisa zvidikanwi zvezvino zvekugadzira semiconductor, asi inopawo hwaro hwezvinhu hwakakosha hwekuvandudza tekinoroji yepamusoro semiconductor mune ramangwana.
Iko kuchena kwehafnium tetrachloride ine zvakakosha pakuita, kuvimbika uye hupenyu hwesemiconductor zvishandiso. Yakakwirira-kuchena hafnium tetrachloride inogona kuvimbisa kunaka uye kushanda kwefirimu, kuderedza kuvuza ikozvino, kuwedzera kuparara kwemagetsi, kuwedzera kugadzikana kwemafuta uye kugadzikana kwemakemikari, nokudaro kuvandudza kushanda kwese uye kuvimbika kwemidziyo ye semiconductor. Nekuenderera mberi kwekufambira mberi kwehunyanzvi hwekugadzira semiconductor, izvo zvinodikanwa zvekuchena kwehafnium tetrachloride zvichave zvakakwirira uye nepamusoro, izvo zvinozosimudzira kuvandudzwa kwehunyanzvi hwekuchenesa tekinoroji.
Nguva yekutumira: Kubvumbi-22-2025