Nekukurumidza kusimudzira kwe5G, kungwara kwekugadzira (AI) uye Internet yezvinhu (IoT), kudiwa kwezvinhu zvepamusoro-soro muindasitiri yesemiconductor kwakawedzera zvakanyanya.Zirconium tetrachloride (ZrCl₄), sechinhu chakakosha semiconductor zvinhu, chave chinhu chisingakoshesi mbishi machipisi epamberi (akadai se3nm/2nm) nekuda kwebasa rayo rakakosha mukugadzirira kwepamusoro-k mafirimu.
Zirconium tetrachloride uye high-k mafirimu
Mukugadzira semiconductor, high-k mafirimu ndeimwe yezvinhu zvakakosha zvekuvandudza chip performance. Sezvo maitiro ekuramba achidonha echinyakare silicon-yakavakirwa gedhi dielectric zvinhu (seSiO₂), ukobvu hwavo hunosvika painogumira yemuviri, zvichikonzera kuwedzera kudonha uye kuwedzera kukuru kwekushandiswa kwesimba. High-k zvinhu (zvakadai se zirconium oxide, hafnium oxide, nezvimwewo) zvinogona kuwedzera kuwedzera kwemuviri we dielectric layer, kuderedza tunneling effect, uye nokudaro kuvandudza kugadzikana nekushanda kwezvigadzirwa zvemagetsi.
Zirconium tetrachloride inokosha inotangira pakugadzirira kwepamusoro-k mafirimu. Zirconium tetrachloride inogona kushandurwa kuita yakakwirira-kuchena zirconium oxide mafirimu kuburikidza nemaitiro akadai semakemikari vapor deposition (CVD) kana atomic layer deposition (ALD). Aya mafirimu ane zvakanakisa dielectric zvivakwa uye anogona zvakanyanya kuvandudza mashandiro uye simba remachipisi. Semuyenzaniso, TSMC yakaunza akasiyana ezvishandiso zvitsva uye kuvandudzwa kwemaitiro mune yayo 2nm maitiro, kusanganisira kushandiswa kweakakwira dielectric anogara mafirimu, ayo akawana kuwedzera kwe transistor density uye kuderedzwa kwesimba rekushandisa.
Global Supply Chain Dynamics
Munyika yose semiconductor supply chain, kupa uye kugadzira maitiro ezirconium tetrachloridezvakakosha mukusimudzira indasitiri. Parizvino, nyika nematunhu akadai seChina, United States neJapan vane chinzvimbo chakakosha mukugadzirwa kwe zirconium tetrachloride uye zvine hukama nepamusoro dielectric zvisingaperi zvinhu.
Kubudirira kwehunyanzvi uye tarisiro yeramangwana
Kubudirira kwetekinoroji ndizvo zvinhu zvakakosha mukusimudzira kushandiswa kwe zirconium tetrachloride muindasitiri yesemiconductor. Mumakore achangopfuura, iyo optimization yeatomic layer deposition (ALD) maitiro yave hotspot yekutsvaga. Iyo ALD maitiro anogona kunyatso kudzora ukobvu uye kufanana kwefirimu pane nanoscale, nekudaro kuvandudza kunaka kwepamusoro dielectric anogara mafirimu. Semuenzaniso, boka rekutsvagisa raLiu Lei wePeking University rakagadzira yakakwira dielectric inogara amorphous firimu nenzira yemakemikari yakanyorova uye yakabudirira kuishandisa kune maviri-dimensional semiconductor zvemagetsi zvigadzirwa.
Uye zvakare, sezvo semiconductor maitiro anoramba achienderera mberi kusvika kune madiki saizi, chiyero chekushandisa che zirconium tetrachloride chiri kuwedzera zvakare. Semuyenzaniso, TSMC inoronga kuwana kugadzirwa kwakawanda kwe2nm tekinoroji muhafu yechipiri ya2025, uye Samsung iri kusimudzirawo kutsvagisa nekusimudzira kwayo 2nm maitiro. Kuzadzikiswa kweaya maitiro epamberi hakuparadzaniswe kubva pakutsigirwa kweakakwira-dielectric anogara mafirimu, uye zirconium tetrachloride, sechinhu kiyi mbishi, ndeyekuzviratidzira kukosha.
Muchidimbu, basa rakakosha re zirconium tetrachloride muindasitiri yesemiconductor riri kuramba richikura. Nekuzivikanwa kwe5G, AI neInternet Yezvinhu, kudiwa kwemachipisi epamusoro-soro kuri kuramba kuchiwedzera. Zirconium tetrachloride, seyakakosha precursor yemafirimu epamusoro-dielectric anogara aripo, ichaita basa risingadzokerike mukusimudzira kuvandudzwa kwechizvarwa chinotevera chip tekinoroji. Mune ramangwana, nekuenderera mberi kwekufambira mberi kwetekinoroji uye nekugonesa kwepasi rose rekupa cheni, tarisiro yekushandisa ye zirconium tetrachloride ichave yakakura.
Nguva yekutumira: Kubvumbi-14-2025